Semiconductor Wafer Center Concentricity and Notch Positioning with Through-Beam Edge Sensor

Semiconductor Wafer Center Concentricity and Notch Positioning with Through-Beam Edge Sensor
Semiconductor Wafer Center Concentricity and Notch Positioning with Through-Beam Edge Sensor

Semiconductor Wafer Center Concentricity and Notch Positioning with Through-Beam Edge Sensor

Industry pain points and demands

Semiconductor wafers often consist of multiple thin-film layers, each varying in material and structure. The Through-Beam Edge Sensor offers exceptional stability and micron-level accuracy for wafer thickness measurement. It effectively handles a range of materials, including those with high transparency, high reflectivity, low reflectance, or rough textures. This capability addresses challenges like unstable signal feedback caused by different material properties, ensuring reliable and precise measurements across diverse scenarios.

 

Challenges include:

 Center Concentricity: Detecting misalignment of wafer centers with precision can directly impact processing accuracy and yield.

 Notch Positioning: Accurate detection of wafer notches ensures proper orientation during processing.

 Speed and Accuracy: Modern production lines demand real-time, high-precision sensing solutions to handle high-throughput environments.


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SinceVision Solution: SE1-010K4 Through-Beam Edge Sensor

01Ultra-High Accuracy: Provides a repetition accuracy of 2μm, enabling precise concentricity and notch detection for improved chip yield.
02Fast Response Time: With a sampling period of just 250μs, it meets the demands of high-speed production environments.
03Wide Application Adaptability: Reliable performance on wafers of varying sizes and thicknesses, ensuring consistency across different processes.

Camera Selection

Technical specifications of SinceVision sensors
Measuring rangeEdge: ±5mm
Transmitter-receiver distanceMax. 300mm
Light sourceSemiconductor red laser
linearityWhen the distance between transceiver and receiver is 100mm: ±0.4%F.S. (±40μm)
Repetition accuracy2μm
Response time250μs
interfaceRS485
Ambient temperature/humidity-20℃ ~ +50℃/35 ~ 85%RH (no condensation freezing)
Store temperature/humidity-40℃ ~ +70℃/35 ~ 85%RH (no condensation freezing)
Protection classIP67
Shell materialAluminium alloy
dimension21 mm x 61 mm x 10.6 mm



Controller main index
Model numberSEA-DM2-A/VSEA-DM2
Number of sensor head connectionsMax. 2 pairs of sensor headsMax. 2 pairs of sensor heads
Sensor head connection modeM8 6-pin connectorM8 6-pin connector
Sensor head communication modeRS-485 (maximum 20m cable)RS-485 (maximum 20m cable)
Display measurementTFT screenTFT screen
Display lightPower indicator: Green; Output indicator: RedPower indicator: Green; Output indicator: Red
I/O external input1 way (also valid for sensor head channel 1/ Channel 2)
I/O switching output2 output PNP/NPN Optional open collector Max. 100mA/DC 24V Residual voltage less than 1.8V
I/O analog output2 output analog current/voltage Optional, current: 4 ~ 20mA (maximum load 300Ω) or voltage: 0 ~ 10V (output resistance 100Ω)
Protection LevelIP50IP50
Operating environment Temperature/Humidity-20 ° C to +50 ° C /35 to 85%RH (without condensation freezing)-20 ° C to +50 ° C /35 to 85%RH (without condensation freezing)
Storage environment temperature/humidity-20 ℃~+70 ℃/35~85% RH (without condensation or freezing)-20 ℃~+70 ℃/35~85% RH (without condensation or freezing)
InstallationDIN rail installation settingDIN rail installation setting
shell materialPC+ glass fiberPC+ glass fiber



EtherCAT communication unit technical specifications
EtherCAT distance between nodesMax. 100m
EtherCAT Transfer speed100Mbps
EtherCAT mapping functionProcess data communication, mailbox communication
Connect sensor connected modelsController SEA-DM2
Connection Number of connections that can be made to sensorsMaximum 8 controllers (16 pairs of sensing heads)
Connection sensor connectable form10-pin connector
PDO communication data transmissionsupport
SDO communication data transfersupport
Use ambient temperature/humidity-20℃ ~ +50℃/35 ~ 85%RH (no condensation freezing)
Storage environment temperature/humidity-40℃ ~ +70℃/35 ~ 85%RH (no condensation freezing)
Protection classIP50
install35mm DIN Rail (conductive)
Shell materialPC+ Glass fiber


Model description of the deviation correcting sensor
Transmitting sensing headSE1-010K4-T
Receiving sensor headSE1-010K4-R
controllerSEA-DM2-A/V; SEA-DM2
EtherCAT Universal Communication moduleSU1-EC
2m long Y-shaped cableSCB-EY-HA3-2m
5m long Y-shaped cableSCB-EY-HA3-5m
5m long extension cableSCB-EF-HA3-5m