Semiconductor Wafer Center Concentricity and Notch Positioning with Through-Beam Edge Sensor
Semiconductor wafers often consist of multiple thin-film layers, each varying in material and structure. The Through-Beam Edge Sensor offers exceptional stability and micron-level accuracy for wafer thickness measurement. It effectively handles a range of materials, including those with high transparency, high reflectivity, low reflectance, or rough textures. This capability addresses challenges like unstable signal feedback caused by different material properties, ensuring reliable and precise measurements across diverse scenarios.
Challenges include:
Center Concentricity: Detecting misalignment of wafer centers with precision can directly impact processing accuracy and yield.
Notch Positioning: Accurate detection of wafer notches ensures proper orientation during processing.
Speed and Accuracy: Modern production lines demand real-time, high-precision sensing solutions to handle high-throughput environments.
SinceVision Solution: SE1-010K4 Through-Beam Edge Sensor
Camera Selection
Technical specifications of SinceVision sensors | |
Measuring range | Edge: ±5mm |
Transmitter-receiver distance | Max. 300mm |
Light source | Semiconductor red laser |
linearity | When the distance between transceiver and receiver is 100mm: ±0.4%F.S. (±40μm) |
Repetition accuracy | 2μm |
Response time | 250μs |
interface | RS485 |
Ambient temperature/humidity | -20℃ ~ +50℃/35 ~ 85%RH (no condensation freezing) |
Store temperature/humidity | -40℃ ~ +70℃/35 ~ 85%RH (no condensation freezing) |
Protection class | IP67 |
Shell material | Aluminium alloy |
dimension | 21 mm x 61 mm x 10.6 mm |
Controller main index | ||
Model number | SEA-DM2-A/V | SEA-DM2 |
Number of sensor head connections | Max. 2 pairs of sensor heads | Max. 2 pairs of sensor heads |
Sensor head connection mode | M8 6-pin connector | M8 6-pin connector |
Sensor head communication mode | RS-485 (maximum 20m cable) | RS-485 (maximum 20m cable) |
Display measurement | TFT screen | TFT screen |
Display light | Power indicator: Green; Output indicator: Red | Power indicator: Green; Output indicator: Red |
I/O external input | 1 way (also valid for sensor head channel 1/ Channel 2) | |
I/O switching output | 2 output PNP/NPN Optional open collector Max. 100mA/DC 24V Residual voltage less than 1.8V | |
I/O analog output | 2 output analog current/voltage Optional, current: 4 ~ 20mA (maximum load 300Ω) or voltage: 0 ~ 10V (output resistance 100Ω) | |
Protection Level | IP50 | IP50 |
Operating environment Temperature/Humidity | -20 ° C to +50 ° C /35 to 85%RH (without condensation freezing) | -20 ° C to +50 ° C /35 to 85%RH (without condensation freezing) |
Storage environment temperature/humidity | -20 ℃~+70 ℃/35~85% RH (without condensation or freezing) | -20 ℃~+70 ℃/35~85% RH (without condensation or freezing) |
Installation | DIN rail installation setting | DIN rail installation setting |
shell material | PC+ glass fiber | PC+ glass fiber |
EtherCAT communication unit technical specifications | |
EtherCAT distance between nodes | Max. 100m |
EtherCAT Transfer speed | 100Mbps |
EtherCAT mapping function | Process data communication, mailbox communication |
Connect sensor connected models | Controller SEA-DM2 |
Connection Number of connections that can be made to sensors | Maximum 8 controllers (16 pairs of sensing heads) |
Connection sensor connectable form | 10-pin connector |
PDO communication data transmission | support |
SDO communication data transfer | support |
Use ambient temperature/humidity | -20℃ ~ +50℃/35 ~ 85%RH (no condensation freezing) |
Storage environment temperature/humidity | -40℃ ~ +70℃/35 ~ 85%RH (no condensation freezing) |
Protection class | IP50 |
install | 35mm DIN Rail (conductive) |
Shell material | PC+ Glass fiber |
Model description of the deviation correcting sensor | |
Transmitting sensing head | SE1-010K4-T |
Receiving sensor head | SE1-010K4-R |
controller | SEA-DM2-A/V; SEA-DM2 |
EtherCAT Universal Communication module | SU1-EC |
2m long Y-shaped cable | SCB-EY-HA3-2m |
5m long Y-shaped cable | SCB-EY-HA3-5m |
5m long extension cable | SCB-EF-HA3-5m |